In this paper the effect of corrugated diaphragm on performance of MEMS microphone is described. The corrugated diaphragm is modeled in order to improve the sensitivity of micromachined silicon acoustic sensor. Analytical analyzes have been carried out to derive mathematic expressions for the mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown that ...

This paper deals with the design and the development of an equipment, called DDI, as acronym for Disease Detector, developed for the quantitative analysis of neuromotor diseases. It measures the reaction of a person evaluating in the motion of one finger of the hand the time response, the velocity of phalanxes, the force exerted from the finger against a button. The condition of motion are ball...