In recent years, a very large amount of scientific work has been achieved around Micro-Electro-Mechanical Systems (MEMS). Some industrial success stories (accelerometers, gyroscopes and MOEMS) have shown their maturity. MEMS are now starting to take place around us in our everyday life as the microelectronic did 20 years ago. However, a lot of effort is still needed for the integration of ICs a...

In this review paper, several strategies for the implementation of reconfigurable split ring resonators (SRRs) based on RF-MEMS switches are presented. Essentially three types of RF-MEMS combined with split rings are considered: (i) bridge-type RF-MEMS on top of complementary split ring resonators CSRRs; (ii) cantilever-type RF-MEMS on top of SRRs; and (iii) cantilever-type RF-MEMS integrated w...

MEMS resonators have started replacing the quartz crystals and SAW resonators in RF transceivers because of their inherent advantages like high quality factor, small size, robustness and easy integrability with supporting electronics. The paper presents the developments that have taken place in MEMS resonators. Some of the issues in the design and development of electrostatically transduced MEM...

Integrated circuit packaging and their testing is well advanced because of the maturity of the IC industry, their wide applications, and availability of industrial inhstructure. [ 1,2] This is not true for MEMS with respect to packaging and testing. It is more difficult to adopt standardized MEMS device packaging for wide applications although MEMS use many similar technologies to IC packaging....

1.0 INTRODUCTION Solid-state RF devices are currently utilized in a wide array of application areas, including satellite communications systems, wireless communications systems, automotive radars, and defense applications. Currently, PIN diode or Field Effect Transistor (FET)-based switches are utilized for their high switching speeds, high power handling, low drive voltage, low cost, and techn...

This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator) CMOS MEMS are introduced separately. Introduction of associated...

This paper presents a comprehensive case study on electro-mechanical analysis of MEMS[1] variable capacitors. Using the fundamental mechanical and electrical equations, static and dynamic behaviors of the device are studied. The analysis is done for three different modes, namely: dc (static mode), small signal ac and large signal regime. A complete set of equations defining dynamic behavior of ...

Hexapod locomotive Micro-Electro Mechanical Systems (MEMS) microrobot with Pulse-type Hardware Neural Networks (P-HNN) locomotion controlling system is presented in this chapter. MEMS microrobot is less than 5 mm width, length, and height in size. MEMS microrobot is made from a silicon wafer fabricated by micro fabrication technology to realize the small size mechanical components. The mechanic...