In this paper the effect of corrugated diaphragm on performance of MEMS microphone is described. The corrugated diaphragm is modeled in order to improve the sensitivity of micromachined silicon acoustic sensor. Analytical analyzes have been carried out to derive mathematic expressions for the mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown that ...

The gas in a coal seam is clean energy source, but it also the main cause of accidents during mining mineral resources. There large pressure–relief influx upper and lower adjacent layers 1211 working face Wanfeng Coal Mine Jinhui, Shanxi Province, China. Based on evolution law overburden fractures, collaborative extraction mode “directional drilling gas-conducting fractured zone + staggered bur...

In this paper we present a new model for calculating the capacitance of MEMS sensor with corrugated diaphragm. In this work the effect of residual stress is considered on deflection of diaphragm and capacitance of sensor. First, a new analytical analyzes have been carried out to derive mathematic expressions for central deflection of corrugated diaphragm and its relationship with residual stres...