The paper describes the performance analysis, structural design and fabrication of piezoresistive pressure sensor using simulation technique. A polysilicon double nano-wire piezoresistor was fabricated by means of RIE (reactive ion etching). The polysilicon double nanowire pressure sensor has 100x100nm cross section area and has a thickness about 10nm. Finite element method (FEM) is adopted to ...

The silicon based pressure sensor is one of the major applications of the piezoresistive sensor. This paper focuses on the structural design and optimization of the MEMS piezoresistive pressure sensor to enhance the sensitivity. A finite element method (FEM) is adopted for designing the performance of a silicon based piezoresistive pressure sensor. Thermal as well as pressure loading on the sen...

The transition metal nitrides like titanium nitride exhibit very interesting color variation properties depending on the different plasma deposition conditions using cylindrical magnetron sputtering method. It is found in this deposition study that nitrogen partial pressure in the reactive gas discharge environment plays a significant role on the color variation of the film coatings on bell-met...

home uterine activity monitoring (huam) has demonstrated to be of great value for preventing preterm labor in recent years. in this research, a low cost monitoring device for non-invasive monitoring of the uterine activity in pregnant women is presented. the new device has been designed based on an inductive colpitz oscillator and vertical displacement of a ferrite core in a coil. the resulting...

We determined the accuracy of two transcutaneous carbon dioxide monitoring systems (SenTec Digital Monitor with V-Sign Sensor and TOSCA 500 with TOSCA Sensor 92) for the measurement of single values and trends in the arterial partial pressure of carbon dioxide in 122 adult patients during major surgery and in 50 adult patients in the intensive care unit. One or several paired measurements were ...

A combined single electrochemical sensor designed to measure synchronously and transcutaneously oxygen partial pressure and carbon dioxide partial pressure (RADIOMETER prototype) was applied onto the scalp in 21 fetuses during labor. The values of tcPo2 respectively tcPco2 were compared with the values of fetal blood analysis (FBA) and blood from the umbilical artery (UA): Comparing the tcPco2 ...

The wetting properties of solid substrates with customary (i.e., macroscopic) random roughness are considered as a function of the microscopic contact angle of the wetting liquid and its partial pressure in the surrounding gas phase. Analytic expressions are derived which allow for any given lateral correlation function and height distribution of the roughness to calculate the wetting phase dia...

Epitaxial multiferroic BaTiO₃-BiFeO₃ composite thin films exhibit a correlation between the magnetoelectric (ME) voltage coefficient αME and the oxygen partial pressure during growth. The ME coefficient αME reaches high values up to 43 V/(cm·Oe) at 300 K and at 0.25 mbar oxygen growth pressure. The temperature dependence of αME of the composite films is opposite that of recently-reported BaTiO₃...