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With quality factors (Q) often-exceeding 10,000, vibrating micromechanical resonators have emerged as leading candidates for on-chip versions of high-Q resonators used in wireless communications systems. However, as in the case for transistors, extending the frequency of MEMS resonators generally entails scaling of resonator dimensions. Unfortunately, smaller size often coincides with lower-pow...

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Amir H. Safavi-Naeini, 2, ∗ Simon Gröblacher, 2, ∗ Jeff T. Hill, 2, ∗ Jasper Chan, Markus Aspelmeyer, and Oskar Painter 2, 4, † Kavli Nanoscience Institute and Thomas J. Watson, Sr., Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA 91125 Institute for Quantum Information and Matter, California Institute of Technology, Pasadena, CA 91125 Vienna Center for Quantum S...

This paper presents the design of a silicon micromechanical resonator with capacitive transduction for gas sensor based on photoacoustic spectroscopy. It overcomes problems imposed by opposite physical trends originating from sensor’s working principles. The mechanism is considered incompatible detection as it reduces mechanical displacement damping effect, thus decreasing sensitivity. occurs b...

In this paper, a four-bar mechanism with two flexible links is proposed to be used in a micromechanical flying insect robot wing thorax design for stroke amplification. PZT5H and PZN-PT based unimorph actuators are utilized at the input link of the four-bar. The kinematics and dynamics of the proposed wing strcuture with two parallel four-bar mechanisms are analyzed, and DC forces generated at ...

A semi-analytical study of the acoustic radiation losses associated with various transverse vibration modes of a micromechanical (MEMS) annular resonator is presented. The quality factor, Q, of such resonators is of interest in many applications and depends on structural geometry, fluid-structure interaction, and the device encapsulation. Resonators with at least one surface exposed to air can ...