among the intermolecular interactions, the casimir and van der waals forces are the most important forces that highly affect the behavior of nanostructures. this paper studies the effect of such forces on the adhesion of cantilever freestanding nanostructures. the nanostructures are made of a freestanding nano-beam which is suspended between two upper and lower conductive surfaces. the linear s...

Among the intermolecular interactions, the Casimir and van der Waals forces are the most important forces that highly affect the behavior of nanostructures. This paper studies the effect of such forces on the adhesion of cantilever freestanding nanostructures. The nanostructures are made of a freestanding nano-beam which is suspended between two upper and lower conductive surfaces. The linear s...

the presence of van der waals (vdw) force can lead to mechanical instability in freestanding nano-scale actuators. most of the previous researches in this area have exclusively focused on modeling the instability in actuators with one actuating components. while, less attention has been paid to actuators consist of two actuating components. herein, the effect of the vdw force on the instability...

BACKGROUND This paper describes the shaping of freestanding objects out of metallic structures in the nano- and submicron size. The technique used, called nanoforging, is very similar to the macroscopic forging process. RESULTS With spring actuated tools produced by focused ion beam milling, controlled forging is demonstrated. With only three steps, a conical bar stock is transformed to a fla...

The presence of van der Waals (vdW) force can lead to mechanical instability in freestanding nano-scale actuators. Most of the previous researches in this area have exclusively focused on modeling the instability in actuators with one actuating components. While, less attention has been paid to actuators consist of two actuating components. Herein, the effect of the vdW force on the instability...

in this paper, eringen’s nonlocal elasticity and timoshenko beam theories are implemented to analyze the bending vibration for non-uniform nano-beams.  the governing equations and the boundary conditions are derived using hamilton’s principle. a generalized differential quadrature method (gdqm) is utilized for solving the governing equations of non-uniform timoshenko nano-beam for pinned-pinned...

This paper presents a novel experimental–theoretical method to investigate the strength of structures having complex geometries, which are commonly used in microelectromechanical systems (MEMS). It involves the stretching to failure of freestanding thin-film membranes, in a fixed–fixed configuration, containing micro-fabricated sharp cracks, blunt notches and re-entrant corners. The defects, ma...

We report here the epitaxial growth of III-nitride material on freestanding HfO2 gratings by molecular beam epitaxy. Freestanding HfO2 gratings are fabricated by combining film evaporation, electron beam lithography, and fast atom beam etching of an HfO2 film by a front-side silicon process. The 60-μm long HfO2 grating beam can sustain the stress change during the epitaxial growth of a III-nitr...

We develop a novel way to fabricate subwavelength nanostructures on the freestanding GaN slab using a GaN-on-silicon system by combining self-assemble technique and backside thinning method. Silicon substrate beneath the GaN slab is removed by bulk silicon micromachining, generating the freestanding GaN slab and eliminating silicon absorption of the emitted light. Fast atom beam (FAB) etching i...

We extended this technique from Ge self-assembled structures to the group of III-V semiconductors. In a first work [6], self-assembled InAs growth on freestanding Si membranes was investigated. Therefore, SIO samples were pre-patterned to obtain freestanding Si membranes and overgrown using III-V molecular beam epitaxy (MBE). We find that the InAs deposition influences the compliant Si membrane...