Plasmonic lithography with a contact probe records nano-meter scale features and has high-throughput owing to its capability to scan in contact mode. The probe is commonly based on a micrometer-scale cantilever, which leads to the tip-positioning problem due to force-deflection that induces lateral tip displacement. We propose a geometrically modified probe to achieve high positioning accuracy....

in this paper, the stability of a functionally graded magneto-electro-elastic (fg-mee) micro-beam under actuation of electrostatic pressure is studied. for this purpose euler-bernoulli beam theory and constitutive relations for magneto-electro-elastic (mee) materials have been used. we have supposed that material properties vary exponentially along the thickness direction of the micro-beam. gov...

The internal jaw stiffness of the silicon arm and its uniformity directly determine geometric position clamped part, which in turn affects accuracy fusion target ball. slight variation caused by machining errors is a crucial factor affecting micro-target. To accurately detect errors, this paper proposes multi-point detection method combining micro-feed force application high-precision image ins...

The image quality and resolution of the Atomic Force Microscope (AFM) operating in tapping mode is dependent on the quality (Q) factor of the sensing micro-cantilever. Increasing the cantilever Q factor improves image resolution and reduces the risk of sample and cantilever damage. Active piezoelectric shunt control is introduced in this work as a new technique for modifying the Q factor of a p...

Nowadays, atomic force microscope is considered as a useful tool in the determination of intermolecular forces and surface topography with the resolution of nanometers. In this kind of microscope, micro cantilever is considered as the heart of the microscope and is used as a measuring tool.  This paper is aimed towards investigating the behavior of a piezoelectric micro cantilever with a triang...

In this paper, a novel analysis was carried out on the biosensor microcantilevers in order to increase the sensitivity of a microcantilever based biosensor piezoresistive. Holes were made and compared with the basic rectangular (R), triangular (T), and step(S) profile cantilever. Effect of changing the micro-cantilevers profile and its cross-section shape was investigated. A finite element ANSY...

the fundamental natural frequency of vibration of an inflatable cantilever beam is computed from the system of the three equeations given for vibratory motion of the beam. the effect of various parameters is discussed, and it is shown that, as internal pressure increases, fundamental natural frequency will increase , indicating the stiffening characteristics of internal pressure. a single exper...

For more than two decades, the Atomic Force Microscope (AFM) has provided valuable insights in nanoscale phenomena, and it is now widely employed by scientists from various disciplines. AFMs use a cantilever beam with a sharp tip to scan the surface of a sample both to image it and to perform mechanical testing. The AFM measures the deflection of the probe beam so one must first find the spring...

A dynamic method for mass detection, considering attaching positions of micro-objects on microcantilevers, is introduced. Two models based on the Rayleigh– Ritz method were developed for analyses of the first flexural and the first torsional modes of a “cantilever– mass” system, respectively. Due to one-to-one correspondence between the longitudinal adhering positions of the micro-objects and t...

In this study, the free vibration analysis of a functionally graded (FG) micro-beam with tapered cross-section is carried out theoretically. The beam has material distribution according to power law throughout thickness. governing equation reduced an ordinary differential for cross-sectional geometry whose width varies exponentially. Vibrations microbeams were analyzed analytically in elastic v...