The K-band microelectromechanical systems (MEMS) tunable band-pass filter, with a wide-frequency tunable range and miniature size, is able to fulfill the requirements of the multiband satellite communication systems. A novel 21.69–24.36 GHz MEMS tunable band-pass filter is designed, analyzed, fabricated and measured. This paper also designs and analyzes an inductively tuned slow-wave resonator,...

Recent advancements in wireless communication systems utilize miniaturized devices based on microelectromechanical system technology for present and future 5G applications. Nowadays, RF are utilizing frequencies up to 30 GHz with substantial signal propagation that leads a slow data rate. On the other hand, there is huge spectrum available millimeter-wave frequency range of 30–300 GHz. The attr...

This chapter serves as a brief introduction to the basic properties of silicon carbide (SiC) and the advantages of using SiC over other semiconductor materials for microelectromechanical systems (MEMS). Given the excellent and extensive review chapters that follow this one, I have confined this chapter to recent research performed at the University of Edinburgh in the area of SiC microelectrome...

The Internet of Things (IoT) has become more prevalent in recent years and is an integral part everyday life. Thus, the need for ultralow-power sensors processing units dramatically increased. continuous scaling CMOS transistors resulted severe subthreshold leakage high power density issues. In years, microelectromechanical (MEM) relays have attracted research interests. They are viewed as prom...

This paper discusses issues relating to the reliability and methods for employing high-cycle life testing in capacitive RF MEMS switches. In order to investigate dielectric charging, transient current spectroscopy is used to characterize and model the ingress and egress of charges within the switch insulating layer providing an efficient, powerful tool to investigate various insulating material...