A general theoretical model using the coupling effect between the torsion and bending is presented in this paper, which characterizes the static properties of the electrostatic torsional micromirror, especially its pull-in effect. A set of normalized equations governing the static actuation properties of the torsional micromirror based on the parallel plate capacitor model is derived to demonst...

This paper presents an experimental investigation into the mechanisms altering pull-out behaviour of partially pulled hooked-end steel fibres inside artificial crack exposed to wet–dry cycles chlorides and carbon dioxide for 6 months. Mechanical corrosion damage at surface fibre was investigated using three-dimensional optical interferometric profiling, petrographic analyses were used describe ...

We propose an energy-based framework to analyze the statics and dynamics of a ferroelectric negative capacitance-hybrid microelectromechanical system (MEMS) actuator. A mapping function that relates charge on displacement movable electrode is used obtain Hamiltonian hybrid actuator in terms displacement. then use graphical energy–displacement phase portrait plots static pull-in, dynamic pull-ou...

in the current study the effect of casimir force and squeezed film damping on the pull-in instability and dynamic behavior of electrostatically actuated nano and micro electromechanical systems is investigated separately. linear elastic membrane theory is used to model the static and dynamic behavior of system for strip, annular and disk geometries. squeezed film damping effect is modeled using...

In this paper, the dynamic characteristics of clamped-clamped silicon microbeam subjected to electrostatic excitation and mechanical shock is investigated. The Euler-Bernoulli beam model based on the modified couple stress theory with von Kármán geometric non-linearity is utilized in theoretical formulation. Afterwards, squeeze-film damping effects of microstructures for small amplitude vibrati...

the static pull-in instability of beam-type micro-electromechanical systems is theoretically investigated. two engineering cases including cantilever and double cantilever micro-beam are considered. considering the mid-plane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size-dependent euler-bernoulli beam model is used based on a modified couple stress theory, c...

in this paper, the stability of a functionally graded magneto-electro-elastic (fg-mee) micro-beam under actuation of electrostatic pressure is studied. for this purpose euler-bernoulli beam theory and constitutive relations for magneto-electro-elastic (mee) materials have been used. we have supposed that material properties vary exponentially along the thickness direction of the micro-beam. gov...

Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped ...

This study develops a continuous model to analyze the ‘pull-in’ effect in the circular micro-plates used in capacitive-type micro-electro-mechanical systems (MEMS) sensors, actuators and microphones. In developing the model, the governing equation of motion of the deformed plate is established in the form of a partial different equation (PDE) which is then decomposed using the Galerkin method t...

During microscale object manipulation, contact (pull-off) forces and non-contact (capillary, van der Waals, and electrostatic) forces determine the behaviour of the micro-objects rather than the inertial forces. The aim of this article is to give an experimental analysis of the physical phenomena at a microscopic scale in dry and liquid media. This article introduces a review of the major diffe...