In the wave scattering from rough surfaces investigated by using the surface morphology and the vertical AFM, in general the correct and complete results cannot be obtained. If the roughness with respect to the wavelength is more than a critical limit, the theoretical calculation is not the same as the experimental data, and this inequality cannot be corrected without considering the shadowing...

In this simulation model, oblique angle deposition method and Monte Carlo random walks have been used. Growth model was ballistic deposition (BD). Incident particles flux comes to substrate at an angle with respect to normal. Two physical factors including self-shadowing and mobility limitation of incident particles make structures similar to independent columns with different shapes and separa...