This article provides a brief overview of both established and novel ellipsometry techniques, as well as their applications. Ellipsometry is an indirect optical technique, in that information about the physical properties of a sample is obtained through modeling analysis. Standard ellipsometry is typically used to characterize optically isotropic bulk and/or layered materials. More advanced tec...

10 11 Both visible and infrared (IR) spectroscopic ellipsometry have been employed to study the 12 structure of thin layers of bovine submaxillary mucin (BSM) adsorbed on poly(acrylic acid13 block-methyl methacrylate) (PAA-b-PMMA) copolymer and poly(methyl methacrylate) 14 surfaces at three pH values (3, 7 and 10). The adsorbed mucin layer on the copolymer surface 15 had the greatest thickness ...

A scheme of combined reflection and transmission ellipsometry on light-transmitting ambient-film-substrate systems is proposed and the required sample design and instrument operation are investigated. A comparative study of the sensitivity of external and internal reflection and transmission ellipsometry is carried out based on unified linear approximations of the exact equations. These approxi...

This paper discusses the fundamentals, applications, potential, limitations, and future perspectives of polarized light reflection techniques for the characterization of materials and related systems and devices at the nanoscale. These techniques include spectroscopic ellipsometry, polarimetry, and reflectance anisotropy. We give an overview of the various ellipsometry strategies for the measur...

Ellipsometry techniques allow to measure polarization information of materials, requiring precise rotations optical components with different configurations lights and sensors. This results in cumbersome capture devices, carefully calibrated lab conditions, very long acquisition times, usually the order a few days per object. Recent polarimetric spatially-varying reflectance information, but li...

UV-irradiation (172 nm) induced changes of PDMS surfaces were investigated with X-ray photoelectron spectroscopy (XPS) and spectroscopic ellipsometry (SE). Both methods indicate the modification of the PDMS to a silicalike surface (SiO2). These conclusions could be drawn from the elemental composition determined by XPS and the binding energy shifts in the XPS spectra of the Si 2p and O 1s level...