This paper reports a novel fabrication process to develop planarized isolated islands of benzocyclobutene (BCB) polymer embedded in a silicon substrate. Embedded BCB in silicon (EBiS) can be used as an alternative to silicon dioxide in fabrication of electrostatic micromotors, microgenerators, and other microelectromechanical devices. EBiS takes advantage of the low dielectric constant and ther...

A new idea of polishing pad called flexible nanobrush pad (FNP) has been proposed for the low down pressure chemical mechanical planarization (CMP) process of Cu/ultra-low-к materials. The FNP was designed with a surface layer of flexible brush-like nanofibers which can 'actively' carry nanoscale abrasives in slurry independent of the down pressure. Better planarization performances including h...

effect of oil neem seed extract and the neem kernel powder mixed with methanol 85% and ethanol 95% were investigated on two spotted spider mite (tetranychus urticae) under greenhouse (25 ± 5 °c and 40 ± 10% r. h.) and laboratory conditions. mortality percent of each above-mentioned solvent in different concertrations (0.03, 0.06, 0.09, 0.12, 0.15, 0.2, 0.3 and 0.5%) by three methods (leaf dip, ...

In the Chemical Mechanical Polishing (CMP) process used for microelectronics manufacturing, three contact regimes between the wafer surface and the polishing pad may be proposed: direct contact, mixed or partial contact, and hydroplaning. An effective in-situ method for characterizing the wafer/pad contact and a systematic way of relating contact conditions to the process parameters are both la...

PURPOSE Calprotectin is a cytosolic protein with immunomodulatory, antimicrobial, and antiproliferative actions. The concentration of calprotectin increases in infection, inflammation, and malignancy. We determined if calprotectin can be used as a marker for the diagnosis and follow-up of bowel inflammation in cow's milk protein allergy (CMPA). METHODS In total, 32 patients newly diagnosed wi...

Ontology evolution is an essential research area for the widespread use of ontologies in industrial and academic applications. In this paper, we present Change Management Patterns CMP defining three kinds of patterns: Change Patterns, Inconsistency Patterns and Alternative Patterns. CMP patterns are proposed to guide ontology evolution process by driving and controlling change application while...

since the energy analysis considers the quantity of energy, it cannot show the performance of the cooling tower. therefore, in order to optimize the performance of the tower and also the process which the cooling tower is a part of it, it is necessary to analyze the energy and exergy of the tower simultaneously. in this paper, the energy and exergy of one of the cooling towers of khuzestan stee...