Telecommunications providers expect products to perform reliably during operation in the field. Achieving the expected hardware reliability is due to an amalgamation of multiple factors. A significant contribution to reliable performance results from the incorporation of specific materials, which are very corrosion resistant and electrostatic discharge (ESD) safe during the design and manufactu...

This paper presents a fabrication process that integrates polysilicon surface micromachining and deep reactive ion etching (DRIE) bulk silicon micromachining. The process takes advantage of the design flexibility of polysilicon surface micromachining and the deep silicon structures possible with DRIE. As a demonstration, a torsional actuator driven by a combdrive moving in the out-of-plane dire...

This paper presents the design, fabrication and characterization of an RF MEMS switch. Low actuation voltage and high isolation of the switch were achieved by exploiting buckling and bending effects induced by well-controlled residual stress. The effects of residual stress on improving the switch performance have been investigated using both analytical and numerical methods. The proposed RF swi...

Abstract The authors are studying hardware neural networks (HNN) to control the locomotion of microrobot. chip is integrated circuit HNN. We proposed electrostatic motor that new actuator microrobot in our previous research. used waveform generator generate driving waveform. In this paper, will propose using chip. cell body model basic component outputs 3 MHz frequency electrical oscillated pul...

Recently, dielectric elastomer actuators (DEAs) have gathered interest for soft robotics due to their low cost, light weight, large strain, low power consumption, and high energy density. However, developing reliable, compliant electrodes for DEAs remains an ongoing challenge due to issues with fabrication, uniformity of the conductive layer, and mechanical stiffening of the actuators caused by...

Distributed manipulation experiments were performed using a massively-parallel, microfabricated actuator array. An organic ciliary array of thin-lm polyimide bi-morph microactuators exploiting combined thermal and electrostatic control was employed to implement task-level, sensorless manipulation strategies for macro-scopic objects. The tasks of parts-translation,-rotation,-orientation, and-cen...

Distributed manipulation experiments were performed using a massively-parallel, microfabricated actuator array. An organic ciliary array of thinlm polyimide bimorph microactuators exploiting combined thermal and electrostatic control was employed to implement tasklevel, sensorless manipulation strategies for macroscopic objects. The tasks of parts-translation, -rotation, -orientation, and -cent...