This study develops a continuous model to analyze the ‘pull-in’ effect in the circular micro-plates used in capacitive-type micro-electro-mechanical systems (MEMS) sensors, actuators and microphones. In developing the model, the governing equation of motion of the deformed plate is established in the form of a partial different equation (PDE) which is then decomposed using the Galerkin method t...

The objective of this paper is to control the phase shifting by applying a bias DC voltage and changing the mechanical characteristics in electrostatically-actuated micro-beams. This problem can be more useful in the design of micro-phase shifters, which has not generally been investigated their mechanical behavior. By presenting a mathematical modeling, Galerkin-based step by step linearizatio...

In this paper, the pull-in instability of piezoelectric polymeric nanocomposite plates reinforced by functionally graded single-walled carbon nanotubes (FG-SWCNTs) based on modified strain gradient theory (MSGT) is investigated. Various types of SWCNTs are distributed in piezoelectric polymeric plate and also surface stress effect is considered in this research. The piezoelectric polymeric nano...

We report the experimental measurement and simulation of the transient electrostatic pull-in characteristics of microstructural beams fabricated with silicon surface micromachining. Pull-in dynamics are investigated under the influence of compressible squeezed-film damping (CSQFD) for large amplitude motion. A linearized one-dimensional model, using a fitted damping constant, and a two-dimensio...

Dynamic CMOS logic circuits are used in high performance VLSI chips in order to achieve very high system performance. These circuits requires less number of transistors as compare to CMOS logic circuits Dynamic logic circuits are much affected by noise as compared to static CMOS circuit. This is due to the fact that dynamic logic circuits have lower value of switching threshold voltage, which i...

this paper studies pull-in behavior of a bio-mass sensor with a cantilevered cnt actuated electrostatically considering rippling deformation. although this phenomenon can change the behavior of cnt remarkably, its effect on the performance of a cnt-based mass sensor is not investigated yet. this investigation is based on modified euler-bernoulli beam theory and rippling effect is entered the eq...