In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM).  It can b...

Abstract   In this paper analytical analysis of capacitive pressure sensor with clamped diaphragm is presented. Mechanical and electrical properties of the sensor are theoretically analyzed based on theory of thin plates with small deflection and the results are evaluated by use of finite element analysis. The central deflection and capacitance values under uniform external pressure are calcula...

This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity...

the most widely used machine for precision sowing of cucumber and sorghum seeds is vacuum type. the performance and distribution accuracy of the vacuum type metering unit is of great importance. therefore, the experiments at three pressures of 25, 35, 45 mbar and two level of forward speed 3 to 4.5 km/h and 6 to 8.5 km/h were conducted and multiple planting, feeding quality and miss planting we...

A multifunctional platform based on the microhotplate was developed for applications including a Pirani vacuum gauge, temperature, and gas sensor. It consisted of a tungsten microhotplate and an on-chip operational amplifier. The platform was fabricated in a standard complementary metal oxide semiconductor (CMOS) process. A tungsten plug in standard CMOS process was specially designed as the se...

In this paper the voltage/current characteristics and the effect of NO2 gas on the electrical conductivity of a PbPc gas sensor array is studied. The gas sensor is manufactured using vacuum deposition of gold electrodes on sapphire substrate with the lead-phathalocyanine vacuum sublimed on the top of the gold electrodes. In a comparison between two versions of the PbPc gas sensor array, it was ...

Exhaust gas regulations for motor vehicles are becoming stricter year-after-year, and as internal combustion engines are being made more efficient and their exhaust gas reduced, there is increased demand for pressure sensing in the exhaust systems of diesel engine vehicles. Applying a single-chip semiconductor pressure sensor fabricated by a CMOS process, which has been successfully used for ma...