Abstract Nano/NEMS sensors have emerged from MEMS technology. Nano got lot of applications in medical and health care applications. attributes which make them very unique special, such as: small size, low mass, high sensitivity cost production. In this paper we present optimization nano capacitive pressure sensor dimensions for Capacitive are well suited sensing Typically, field involve levels ...

In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists of an inductance, a variable capacitance, and a sealed cavity integrated in the alumina ceramic su...

In the world of MEMS processing today, fabrications of membrane are performed using bulk micromachining (BMM). However these techniques not easiest to integrate with CMOS standard process due to not compatible of the processing flow. An attractive alternative deployment of surface micromachining (SMM). There is a trend to use surface micromachining to their advantage of simplicity in design and...

In this paper excitation characteristics of the Liquid Crystal (LC) capacitive chemical and biological sensor are examined and the optimum frequency and voltage range for the sensor interface are introduced. Interdigitated capacitor has been used for the sensor capacitance measurement and two different molecular orientations, homeotropic and homogenous, have been considered. The LC sensor capac...

In this paper a new design of MEMS capacitive fingerprint sensors is presented. The capacitive sensor is made of two parallel plates with air gap. In these sensors, the capacitance changes is very important factor. It is caused by deformation of the upper electrode of sensor. In this study with making slots in upper electrode, using T-shaped protrusion on diaphragm in order to concentrate the f...

The velocity slip of a fluid at a wall is one of the most typical phenomena in microscale gas flows. This paper presents a flow analysis considering the velocity slip in a capacitive micro gas flow sensor based on pressure difference measurements along a microchannel. The tangential momentum accommodation coefficient (TMAC) measurements of a particular channel wall in planar microchannels will ...

This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer release, resulting in a sensitivity of 1.2 fF/kPa within the range from 0 to 600 kPa. A three-stag...

We have designed and fabricated the first single-wafer proportional micro control valve with built-in capacitive displacement sensing. The displacement sensor can facilitate high-speed active proportional control of gas flow through the valve. This is an essential requirement for non-invasive blood pressure waveform monitoring based on following the arterial pressure with a counter pressure. We...

Usually the environmental parameters influence the sensor characteristics in a nonlinear manner. Therefore obtaining correct readout from a sensor under varying environmental conditions is a complex problem. In this paper we propose a neural network (NN)-based interface framework to automatically compensate for the nonlinear influence of the environmental temperature and the nonlinear-response ...