In this paper the effects of accidental impacts on polysilicon MEMS sensors are investigated within the framework of a three-scale finite element approach. By allowing for the very small ratio (on the order of 10−4) between the inertia of the MEMS and the inertia of the whole device, macro-scale analyses at the package length-scale are run to obtain the loadF. Fachin is currently with: Technolo...

In this paper, we present mathematical analyses to consider the effect of material properties on the sensitivity of the Microelectromechanical systems (MEMS) piezoelectric hydrophone and improve the sensitivity by choosing the proper material. The selected structure in the present paper is a piezoelectric hydrophone able to work at low frequencies. The piezoelectric hydrophones are widely used ...

In this paper, a homogenous multi-sensor fusion method is used to estimate the trueangular rate and acceleration with a combination of four low cost (< 10$) MEMS Inertial MeasurementUnits (IMU). An information form of steady state Kalman filter is designed to fuse the output of four lowaccuracy sensors to reduce the noise effect by the square root of the number of sensors. A hardware isimplemen...

Effects of surface chemical modification with sodium silicate on the gas-sensing properties of F-doped SnO2 gas sensor designed and fabricated employing micro-electro mechanical system (MEMS) technology were investigated. Gas sensing properties of the sensor were checked against combustible gases like H2, CO, CH4 and C3H8 at a heater voltage of 0.7 V. The H2 sensitivity of the surface modified ...

This paper proposes the electronic heart sound sensor, based on the piezoresistive principle and MEMS (Micro-Electro-Mechanical System) technology. Firstly, according to the characteristics of heart sound detection, the double-beam-block microstructure has been proposed, and the theoretical analysis and finite element method (FEM) simulation have been carried out. Combined with the natural freq...

In recent years, a very large amount of scientific work has been achieved around Micro-Electro-Mechanical Systems (MEMS). Some industrial success stories (accelerometers, gyroscopes and MOEMS) have shown their maturity. MEMS are now starting to take place around us in our everyday life as the microelectronic did 20 years ago. However, a lot of effort is still needed for the integration of ICs a...

In this paper, a MEMS based capacitive nasal sensor system for measuring Respiration Rate (RR) of human being is developed. At first two identical diaphragm based MEMS capacitive nasal sensors are designed and virtually fabricated. A proposed schematic of the system consists of signal conditioning circuitry alongwith the sensors is described here. In order to measure the respiration rate the se...

This paper reports the successful development of the first IC-integrated flexible MEMS shear-stress sensor skin. The sensor skin is 1 cm wide, 2 cm long, and 70 m thick. It contains 16 shear-stress sensors, which are arranged in a 1-D array, with on-skin sensor bias, signal-conditioning, and multiplexing circuitry. We further demonstrated the application of the sensor skin by packaging it on a ...

Integrated GPS/INS systems provide an enhanced navigation system that has superior performance in comparison with either system operating in stand-alone mode as it can overcome each of their limitations. The high cost and government regulations prevent the wider inclusion of high quality IMUs to augment GPS as a commercialized navigation system in many navigation applications. The progress in M...

A bio-inspired absolute pressure sensor network has been developed. Absolute pressure sensors, distributed on multiple silicon islands, are connected as a network by stretchable polyimide wires. This sensor network, made on a 4'' wafer, has 77 nodes and can be mounted on various curved surfaces to cover an area up to 0.64 m × 0.64 m, which is 100 times larger than its original size. Due to Micr...