Getting Micro-Electro-Mechanical Systems (MEMS) out of a wafer after fabrication processes is of great interest in testing, packaging or simply using these devices. Actual solutions require special machines like wafer dicing machines, increasing time and cost of de-tethering MEMS. This article deals with a new solution for manufacturing mechanical de-tetherable silicon MEMS. The presented solut...

The silicon-based MEMS fabrication technology, including bulk micromachining and sacrificial layers technology have been developed and studied. The 3-D fabrication and integration of silicon-based MEMS and standard process fabrication have been studied in the present paper. 1 Introduction MEMS devices and systems offer advantages of small volume, light weight, low power, and the integration of ...

To solve the coupling and optimizing problems in MEMS designing and analyzing process, the paper mainly put forward to the uniform model construction simulation method. The method adopt uniform constraints to describe MEMS multi-fields simulation model, firstly construct MEMS model library which includes structure, electricity, magnetic, thermal and fluid elements in multi-field uniform languag...

An overview of the MEMS technology development and applications is given in this paper. A special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches have been considered. It is also presented a technique for modeling and design of inductively-tuned MEMS shunt switch. Some very important issues for the device maturity e.g. reliability and packaging have been addressed.

For more than two decades, intensive worldwide MEMS research and development have led to widespread applications of MEMS-based devices in consumer, industrial, and military products. Harnessing of MEMS technology enabled the birth of pressure sensors, accelerometers, gyroscopes, print heads, optical switches for rapid communications and, recently, the bio-chips for life science applications. Su...

BACKGROUND An often-used tool to measure adherence to antiretroviral therapy (ART) is the Medication Event Monitoring System (MEMS), an electronic pill-cap that registers date and time of pill-bottle openings. Despite its strengths, MEMS-data can be compromised by inaccurate use and acceptability problems due to its design. These barriers remain, however, to be investigated in resource-limited ...

in this paper, an adaptive neuro fuzzy inference system (anfis) based control is proposed for the tracking of a micro-electro mechanical systems (mems) gyroscope sensor. the anfis is used to train parameters of the controller for tracking a desired trajectory. numerical simulations for a mems gyroscope are looked into to check the effectiveness of the anfis control scheme. it proves that the sy...

In this paper we develop a numerical procedure using finite element and augmented Lagrangian meth-ods that simulates electro-mechanical pull-in states of both cantilever and fixed beams in microelectromechanical systems (MEMS) switches. We devise the augmented Lagrangian methods for the well-known Euler-Bernoulli beam equation which also takes into consideration of the fringing effect of electr...

In this paper, a model for MEMS capacitive microphone is presented for integrated circuits.  The microphone has a diaphragm thickness of 1 μm, 0.5 × 0.5 mm2 dimension, and an air gap of 1.0 μm. Using the analytical and simulation results, the important features of MEMS capacitive microphone such as pull-in voltage and sensitivity are obtained 3.8v and 6.916 mV/Pa, respectively while there is no...