A miniature silicon condenser microphone diaphragm has been designed that exhibits good predicted directionality, sensitivity, and reliability. The design was based on the structure of a fly’s ear (Ormia ochracea) that has highly directional hearing through mechanical coupling of the eardrums. The diaphragm that is 1mm x 2mm x 20 microns is intended to be fabricated out of polysilicon through m...

Capacitive-type transduction is now widely used in MEMS microphones. However, its sensitivity decreases with reducing size, due to decreasing air gap capacitance. In the present study, we proposed and developed the Electret Gate of Field Effect Transistor (ElGoFET) transduction based on an electret and FET (field-effect-transistor) as a novel mechanism of MEMS microphone transduction. The ElGoF...

This paper extends an earlier work that achieved resonance damping of a micro-machined directional microphone by embedding it in a compensated sigma-delta modulator (Wu et al., 2004). The goal was to combat the quadratic nonlinearity in the electrostatic force. The new developments in this paper include the use of a different capacitive device that is also biased to allow more effective readout...

external amplifier was able to detect the sound waves from microphone on speaker and oscilloscope. The maximum amplitude of output speech signal of amplifier is 45 mV, and the maximum output of MEMS microphone is 1.125 µV.

Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped ...

Novel single-chip fabricated condenser structures with corrugated diaphragms for residual stress releasing have been proposed and simulated. An electrostatic-structural coupling FEM analysis has been performed to fully reveal the nonlinear relationship of output electrical signal with respect to input mechanical change. The influence of various nonlinear effects on the performance of transducer...