Jump and pull-in instability are common nonlinear dynamic behaviors leading to the loss of performance reliability structural safety electrostatic micro gyroscopes. To achieve a better understanding these initial-sensitive phenomena, dynamics gyroscope system considering nonlinearities stiffness forces explored from global perspective. Static analyses performed estimate threshold detecting volt...

The reproducibility of the pull-in voltage of a single side clamped free-standing beam has been investigated for application as a DC voltage reference. A 2 mm long beam has been fabricated in an epipoly process with, at the tip, poly-poly electrodes extending into the axial direction for electrostatic lateral deflection and a combdrive operating in the normal lateral beam direction. The DC volt...

The static pull-in instability of beam-type microelectromechanical systems (MEMS) is theoretically investigated. Two engineering cases including cantilever and double cantilever microbeam are considered. Considering the midplane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size-dependent Euler-Bernoulli beam model is used based on a modified couple stress theor...

The mass-spring model of electrostatically actuated microelectromechanical systems (MEMS) or nanoelectromechanical systems (NEMS) is pervasive in the MEMS and NEMS literature. Nonetheless a rigorous analysis of this model does not exist. Here periodic solutions of the canonical mass-spring model in the viscosity dominated time harmonic regime are studied. Ranges of the dimensionless average app...

The reproducibility over temperature and time of the pull-in voltage of micromechanical structures has been analyzed and verified using fabricated devices in silicon. The pull-in structures are intended for use as an on-chip voltage reference. Microbeams of 100m length, 3m width, and 11m thickness are electrostatically actuated with a very reproducible pull-in voltage at 9.1 V. Devices demonstr...

The pull-in voltage of a parallel plate electrostatic transducer is used to determine the amount of over-etching in fabricated devices. A detailed analysis of the capacitor behaviour over the full displacement range yields a model, which is used to describe the relation between over-etching and measured pull-in voltage. SEM photos confirm the over-etching measurement based on pull-in voltage. T...

In hard-switched converters, the switching frequency is limited by switching losses and EMI problems. However, high-switching frequency is necessary to reduce the converter size. Hence, soft switching is imperative at high switching frequency to obtain good efficiency. Push–pull converter is a preferred topology at medium power level. This paper proposes a novel resonant transition topology for...